Water Cooling MBE System

• Water cooling and no need for liquid nitrogen

• Automatic baking mechanism (Option)

• Support automatic film formation software

• The MBE system is a device developed  by our entirely new concept. It does not  use liquid nitrogen for cooling.

• And automatic baking mechanism and automatic film formation software are available.

• The system includes a chamber with source flanges for effusion cells as standard
equipment. The combination of different size of source flange is available for use with EB gun sputter gun as an option. Consequently EB gun and sputter gun are usable and the system has a much broader range of applications.

• In case water leakage accidentally occurs, the system adopts watertight construction in the pumping system.

2.High film quality control and excellent operation performances.

• RHEED pattern, spectum by radical beam source, spectrum by mass spectrometer etc. can be observed and controlled on the LCD operation screen.

• Preheating mechanism and radical beam source can be mounted onto the loading
lock chamber.